Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10583847
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Filing Dt:
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07/15/2008
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Publication #:
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Pub Dt:
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11/06/2008
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Inventors:
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Toshihisa Nozawa, Koji Kotani
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Title:
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Temperature Controlling Method for Substrate Processing System and Substrate Processing System
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| MICHAEL A. MAKUCH |
| SMITH, GAMBRELL & RUSSELL, LLLP |
| 1130 CONNECTICUT AVENUE |
| SUITE 1130 |
| WASHINGTON, DC 20036 |
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