Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11628014
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Filing Dt:
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05/27/2008
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Publication #:
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Pub Dt:
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11/06/2008
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Inventors:
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Akira Sekiya, Tatsuya Sugimoto, Takanobu Mase, Toshiro Yamada
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Title:
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Dry Etching Gas and Method of Dry Etching
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, KASUMIGASEKI 1-CHOME, CHIYODA-KU, |
| TOKYO, JAPAN 100-8921 |
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| 6-1, MARUNOUCHI 2-CHOME, CHIYODA-KU, |
| TOKYO, JAPAN 100-8323 |
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| KRATZ, QUINTOS & HANSON, LLP. |
| 1420 K STREET, N.W. SUITE 400 |
| WASHINGTON, DC 20005 |
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