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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
NONE
Issue Dt:
Application #:
12194229
Filing Dt:
08/19/2008
Publication #:
20080304033
Pub Dt:
12/11/2008
Inventors:
Bernhard Kneer, Norbert Wabra, Toralf Gruner, Alexander Epple, Susanne Beder et al
Title:
PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
021421/0532Recorded: 08/21/2008Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KNEER, BERNHARD
Exec Dt:
09/12/2006
WABRA, NORBERT
Exec Dt:
09/06/2006
GRUNER, TORALF
Exec Dt:
09/05/2006
EPPLE, ALEXANDER
Exec Dt:
08/31/2006
BEDER, SUSANNE
Exec Dt:
09/08/2006
SINGER, WOLFGANG
Exec Dt:
09/05/2006
Assignee:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
SEAN P. DALEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
025763/0367Recorded: 01/18/2011Pages: 28
Conveyance:
A MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
Correspondent:
TIMOTHY A. FRENCH
FISH & RICHARDSON P.C.
ONE MARINA PARK DRIVE
BOSTON, MASSACHUSETTS 02210-1878

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