Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11749069
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Filing Dt:
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06/26/2007
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Publication #:
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Pub Dt:
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01/01/2009
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Inventors:
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Jang Gyoo Yang, Michael Barnes, Terry Bluck
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Title:
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HYBRID ETCH CHAMBER WITH DECOUPLED PLASMA CONTROLS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3560 BASSETT STREET |
SANTA CLARA, CALIFORNIA 95054 |
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SUGHRUE MION, PLLC |
401 CASTRO STREET, SUITE 220 |
MOUNTAIN VIEW, CA 94041 |
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