Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/14/2012
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Application #:
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12213823
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Filing Dt:
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06/25/2008
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Publication #:
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Pub Dt:
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01/15/2009
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Inventors:
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Akira Hayashida, Masaaki Ueno, Masakazu Shimada, Masashi Sugishita, Toshimitsu Miyata et al
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Title:
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HEATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1, SOTOKANDA 4-CHOME, |
| CHIYODA-KU |
| TOKYO, JAPAN 101-8980 |
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| 1-5-32, SHIGITA, JOTO-KU, OSAKA-SHI |
| OSAKA, JAPAN 536-0015 |
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| RADER, FISHMAN & GRAUER PLLC |
| 1233 20TH STREET, N.W. |
| SUITE 501 |
| WASHINGTON, DC 20036 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE & KOENIG, P.C. |
| 30 SOUTH 17TH STREET |
| SUITE 1800 |
| PHILADELPHIA, PA 19103 |
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