Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/01/2013
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Application #:
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12046094
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Filing Dt:
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03/11/2008
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Publication #:
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Pub Dt:
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01/29/2009
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Inventors:
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Satoshi TANAKA, Chishio Koshimizu, Toru Ito, Manabu Iwata, Naoki Matsumoto
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Title:
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PLASMA PROCESSING APPARATUS AND METHOD OF PLASMA DISTRIBUTION CORRECTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| OBLON, SPIVAK, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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