Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12196178
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Filing Dt:
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08/21/2008
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Publication #:
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Pub Dt:
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02/26/2009
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Inventor:
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Yuichi SHIBAZAKI
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Title:
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MOVABLE BODY DRIVE METHOD AND MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, DEVICE MANUFACTURING METHOD, AND PROCESSING SYSTEM FOR DETECTING MOVABLE BODY WITHIN OPERATING AREA USING ENCODER OR OUTSIDE OPERATING AREA USING INTERFEROMETER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100-8331, JAPAN |
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| MARIO A. COSTANTINO |
| OLIFF & BERRIDGE, PLC |
| P.O. BOX 320850 |
| ALEXANDRIA, VA 22320-4850 |
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