Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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07/20/2010
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Application #:
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11849797
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Filing Dt:
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09/04/2007
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Publication #:
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Pub Dt:
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03/05/2009
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Inventors:
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Vivek Bakshi, Stefan Wurm
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Title:
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SYSTEMS AND METHODS FOR IN-SITU REFLECTIVITY DEGRADATION MONITORING OF OPTICAL COLLECTORS USED IN EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2706 MONTOPOLIS DRIVE |
| AUSTIN, TEXAS 78741 |
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| LUIZ VON PAUMGARTTEN |
| 600 CONGRESS AVE. |
| SUITE 2400 |
| AUSTIN, TX 78701 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ST.-MARTIN-STRASSE 53 |
| RECHTSABTEILUNG/LEGAL DEPARTMENT |
| MUNCHEN, GERMAN DEMOCRATIC REPUBLIC 81669 |
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| LUIZ VON PAUMGARTTEN |
| 600 CONGRESS AVE. |
| SUITE 2400 |
| AUSTIN, TX 78701 |
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