Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12016434
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Filing Dt:
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01/18/2008
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Publication #:
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Pub Dt:
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03/12/2009
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Inventors:
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Koichi NAKAUNE, Masatoshi Oyama, Motohiro Tanaka, Hitoshi Tamura, Masamichi Sakaguchi
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Title:
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DRY ETCHING METHOD OF HIGH-K FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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24-14, NISHISHINBASHI, 1-CHOME |
MINATO-KU, TOKYO, JAPAN |
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ANTONELLI, TERRY, STOUT & KRAUS, LLP |
1300 NORTH 17TH STREET - SUITE 1800 |
ARLINGTON, VA 22209 |
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05/04/2024 03:48 AM
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