Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12188440
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Filing Dt:
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08/08/2008
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Publication #:
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Pub Dt:
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03/19/2009
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Inventors:
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Hironobu Miya, Yuji Takebayashi, Atsuhiko Suda, Masanori Sakai, Shinya Sasaki et al
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Title:
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CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1 SOTOKANDA 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 1018980 |
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| MATTINGLY, STANGER, MALUR & BRUNDIDGE,PC |
| 1800 DIAGONAL ROAD |
| SUITE 370 |
| ALEXANDRIA, VA 22314 |
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