Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12015999
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Filing Dt:
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01/17/2008
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Publication #:
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Pub Dt:
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04/09/2009
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Inventors:
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CHEN-CHUNG DU, JEN-RONG HUANG, MUH-WANG LIANG, CHIH-CHEN CHANG, SHENG-LANG LEE et al
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Title:
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SYSTEM AND METHOD FOR PLASMA ENHANCED THIN FILM DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 195, SEC. 4, CHUNG-HSING RD., CHU-TUNG |
| HSIN-CHU, TAIWAN |
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| WPAT, PC |
| 7225 BEVERLY ST. |
| ANNANDALE, VA 22003 |
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