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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
12/06/2011
Application #:
12268524
Filing Dt:
11/11/2008
Publication #:
Pub Dt:
04/09/2009
Inventors:
Thomas N. Horsky, Dale C. Jacobson
Title:
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF BORON HYDRIDE CLUSTER IONS
Assignment: 1
Reel/Frame:
022001/0675Recorded: 12/18/2008Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
12/16/2008
Assignee:
34 SULLIVAN ROAD
NORTH BILLERICA, MASSACHUSETTS 01862-2000
Correspondent:
JOHN S. PANIAGUAS
2900 K STREET, NW
SUITE 200
WASHINGTON, DC 20007-5118
Assignment: 2
Reel/Frame:
027162/0261Recorded: 11/02/2011Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/16/2008
Exec Dt:
12/15/2008
Assignee:
34 SULLIVAN ROAD
NORTH BILLERICA, ILLINOIS 01862-2000
Correspondent:
JOHN S. PANIAGUAS
2900 K STREET, NW
SUITE 200
WASHINGTON, DC 20007-5118

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