Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/18/2011
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Application #:
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11867525
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Filing Dt:
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10/04/2007
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Publication #:
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Pub Dt:
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04/09/2009
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Inventors:
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MASAHIRO TAKIZAWA, MASAEI SUWADA
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Title:
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POSITION SENSOR SYSTEM FOR SUBSTRATE TRANSFER ROBOT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 23-1, 6-CHOME NAGAYAMA |
| TAMA-SHI, TOKYO 206-0025, JAPAN |
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| KNOBBE MARTENS OLSON & BEAR LLP |
| 2040 MAIN STREET |
| FOURTEENTH FLOOR |
| IRVINE, CA 92614 |
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