Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/08/2011
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Application #:
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12246461
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Filing Dt:
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10/06/2008
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Publication #:
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Pub Dt:
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04/23/2009
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Inventors:
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G. Grant Peng, Cristian Paduraru, Katrina Mikhaylich
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Title:
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METHODS OF AND APPARATUS FOR CORRELATING GAP VALUE TO MENISCUS STABILITY IN PROCESSING OF A WAFER SURFACE BY A RECIPE-CONTROLLED MENISCUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| ALBERT S. PENILLA, ESQ. |
| 710 LAKEWAY DRIVE, SUITE 200 |
| SUNNYVALE, CA 94085 |
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