Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12102616
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Filing Dt:
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04/14/2008
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Publication #:
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Pub Dt:
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05/21/2009
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Inventors:
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Fenghong ZHANG, Xinyu Zhang
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Title:
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AIM-Compatible Targets for Use with Methods of Inspecting and Optionally Reworking Summed Photolithography Patterns Resulting from Plurally-Overlaid Patterning Steps During Mass Production of Semiconductor Devices
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30 TOH GUAN ROAD, |
| #08-09 ODC DISTRICENTRE, |
| SINGAPORE, SINGAPORE 608840 |
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| GIDEON GIMLAN |
| 2033 GATEWAY PLACE |
| SUITE 400 |
| SAN JOSE, CA 95110 |
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