Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11991106
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Filing Dt:
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02/27/2008
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Publication #:
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Pub Dt:
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05/21/2009
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Inventors:
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Akifumi Kagayama, Norio Nakayama, Hiroaki Tamatani
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Title:
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Solution for immersion exposure and immersion exposure method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-2, HIGASHI-SHIMBASHI 1-CHOME |
| MINATO-KU, TOKYO 105-7117, JAPAN |
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| BUCHANAN, INGERSOLL & ROONEY PC |
| POST OFFICE BOX 1404 |
| ALEXANDRIA, VA 22313-1404 |
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