Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/26/2013
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Application #:
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12330870
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Filing Dt:
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12/09/2008
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Publication #:
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Pub Dt:
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05/28/2009
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Inventors:
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Shigeru HIRUKAWA, Soichi OWA
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Title:
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PATTERN FORMATION METHOD, PATTERN FORMATION APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100-8331, JAPAN |
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| STAAS & HALSEY LLP |
| ATTENTION: PAUL I. KRAVETZ |
| 1201 NEW YORK AVE., N.W., 7TH FLOOR |
| WASHINGTON, D.C. 20005 |
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