Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12323274
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Filing Dt:
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11/25/2008
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Publication #:
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Pub Dt:
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05/28/2009
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Inventors:
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Takuro Ono, Hiroshi Chiba, Hideki Komatsuda
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Title:
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REFLECTIVE PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, PROJECTION METHOD, AND EXPOSURE METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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| MICHAEL R. KELLY - FHFGD |
| 901 NEW YORK AVEUE, NW |
| WASHINGTON, DC 20001-4413 |
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