Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11887350
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Filing Dt:
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09/28/2007
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Publication #:
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Pub Dt:
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05/28/2009
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Inventors:
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Kenmei Ko, Rui Harada, Yuji Takebayashi, Takeshi Itoh, Takashi Koshimizu, Kazuyuki Toyoda
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Title:
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Substrate Processing Apparatus and Semiconductor Device Producing Method
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4-14-I, SOTO-KANDA |
CHIYODA-KU, TOKYO, JAPAN 101-8980 |
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BIRCH, STEWART, KOLASCH & BIRCH, LLP |
P.O. BOX 747 |
FALLS CHURCH, VA 22040-0747 |
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