Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11999083
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Filing Dt:
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12/03/2007
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Publication #:
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Pub Dt:
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06/04/2009
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Inventors:
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Jennifer Y. Sun, Irene A. Chou, Li Xu, Kenneth S. Collins, Thomas Graves
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Title:
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Chemical treatment to reduce machining-induced sub-surface damage in semiconductor processing components comprising silicon carbide
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| SHIRLEY L. CHURCH, ESQ. |
| P.O. BOX 81146 |
| SAN DIEGO, CA 92138 |
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