Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/13/2011
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Application #:
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11998829
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Filing Dt:
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11/30/2007
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Publication #:
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Pub Dt:
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06/04/2009
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Inventors:
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Edward P. Hammond IV, Rodolfo P. Belen, Alexander M. Paterson, Brian K. Hatcher et al
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Title:
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GATE PROFILE CONTROL THROUGH EFFECTIVE FREQUENCY OF DUAL HF/VHF SOURCES IN A PLASMA ETCH PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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P.O. BOX 450A |
LEGAL AFFAIRS DEPT. |
SANTA CLARA, CALIFORNIA 95052 |
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ROBERT W. MULCAHY |
P.O. BOX 450A |
LEGAL AFFAIRS DEPT. |
SANTA CLARA, CA 95052 |
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