Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/02/2014
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Application #:
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12268649
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Filing Dt:
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11/11/2008
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Publication #:
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Pub Dt:
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06/04/2009
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Inventors:
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Isamu SAKURAGI, Akinori Kitamura, Takehiro Shindo, Tsutomu Hiroki
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Title:
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BEVEL/BACKSIDE POLYMER REMOVING METHOD AND DEVICE, SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| RONALD TURNER |
| OBLON, SPIVAK, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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