Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/23/2012
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Application #:
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12371809
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Filing Dt:
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02/16/2009
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Publication #:
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Pub Dt:
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06/11/2009
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Inventors:
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Feng-Yih Chang, Pei-Yu Chou, Jiunn-Hsiung Liao, Ying-Chih Lin, Chih-Wen Feng
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Title:
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METHOD FOR CONTROLLING ADI-AEI CD DIFFERENCE RATIO OF OPENINGS HAVING DIFFERENT SIZES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 3, LI-SHIN RD. II |
| SCIENCE-BASED INDUSTRIAL PARK |
| HSINCHU, TAIWAN R.O.C. |
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| J. C. PATENTS |
| 4 VENTURE, SUITE 250 |
| IRVINE, CA 92618 |
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