Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/26/2010
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Application #:
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12341095
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Filing Dt:
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12/22/2008
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Publication #:
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Pub Dt:
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06/25/2009
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Inventor:
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Todd R. DOWNEY
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Title:
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SYSTEMS AND METHODS FOR LITHOGRAPHIC ILLUMINATOR BEAM DEVIATION MEASUREMENT AND CALIBRATION USING GRATING SENSORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| NL-5504 DR VELDHOVEN, NETHERLANDS |
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| STERNE, KESSLER, GOLDSTEIN & FOX PLLC |
| 1100 NEW YORK AVENUE, NW |
| WASHINGTON, DC 20005 |
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