Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/04/2021
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Application #:
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12332119
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Filing Dt:
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12/10/2008
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Publication #:
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Pub Dt:
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06/25/2009
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Inventors:
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Nobuyuki Kuboi, Tetsuya Tatsumi
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Title:
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DRY ETCHING EQUIPMENT AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1-7-1 KONAN |
MINATO-KU |
TOKYO, JAPAN |
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ROBERT J. DEPKE |
ROCKEY, DEPKE & LYONS, LLC |
233 S. WACKER DRIVE, SUITE 5450 |
CHICAGO, IL 60606 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4-14-ASAHI-CHO |
ATSUGI-SHI, KANAGAWA, JAPAN |
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ROBERT DEPKE |
233 S. WACKER DRIVE |
SUITE 8400 |
CHICAGO, IL 60606 |
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