Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/10/2015
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Application #:
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12332927
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Filing Dt:
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12/11/2008
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Publication #:
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Pub Dt:
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07/09/2009
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Inventors:
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Geun-Young Yeom, Young-Joon Lee, Kyong-Nam Kim
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Title:
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INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS HAVING INTERNAL LINEAR ANTENNA FOR LARGE AREA PROCESSING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 53, MYUNGRYUNDONG 3GA, JONGRO-GU |
| SEOUL 110-745, KOREA, REPUBLIC OF |
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| FOLEY & LARDNER LLP |
| WASHINGTON HARBOUR |
| 3000 K STREET NW. SUITE 500 |
| WASHINGTON, D.C. 20007-5143 |
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