Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11883580
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Filing Dt:
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02/01/2008
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Publication #:
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Pub Dt:
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07/30/2009
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Inventors:
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Satoshi Matsuda, Yuji Asahara, Seiji Goto, Hideo Yamakoshi
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Title:
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Film Forming Apparatus, Matching Device, and Impedance Control Method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1, AZA TAKAMICHI, IWATSUKA-CHO, NAKAMURA-KU, NAGOYA-SHI |
| AICHI, JAPAN 453-8515 |
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| 10-1, SHINKAWA, 2-CHOME, CHUO-KU |
| TOKYO, JAPAN |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| 8110 GATEHOUSE ROAD, SUITE 100E |
| FALLS CHURCH, VA 22042-1248 |
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