Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/08/2011
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Application #:
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12020094
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Filing Dt:
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01/25/2008
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Publication #:
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Pub Dt:
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07/30/2009
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Inventors:
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Yan Shao, Thomas G. Tetreault, John J. Hautala
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Title:
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METHOD FOR INCREASING THE PENETRATION DEPTH OF MATERIAL INFUSION IN A SUBSTRATE USING A GAS CLUSTER ION BEAM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 37 MANNING ROAD |
| BILLERICA, MASSACHUSETTS 01821 |
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| KRISTI L. DAVIDSON |
| 441 VINE STREET |
| 2700 CAREW TOWER |
| CINCINNATI, OH 45202 |
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Assignment:
2
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MERGER (SEE DOCUMENT FOR DETAILS).
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| 3455 LYMAN BLVD. |
| CHASKA, MINNESOTA 55318 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2400 GROVE BLVD |
| AUSTIN, TX 78741 |
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