Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/06/2012
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Application #:
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12363045
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Filing Dt:
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01/30/2009
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Publication #:
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Pub Dt:
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08/06/2009
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Inventors:
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Seiyo NAKASHIMA, Tomoyuki Yamada, Masakazu Shimada
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND PROCESS TUBE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1 SOTOKANDA 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 1018980 |
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| MATTINGLY, STANGER, MALUR & BRUNDIDGE,PC |
| 1800 DIAGONAL ROAD |
| SUITE 370 |
| ALEXANDRIA, VA 22314 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE & KOENIG, P.C. |
| 30 SOUTH 17TH STREET |
| SUITE 1800 |
| PHILADELPHIA, PA 19103 |
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