Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12395465
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Filing Dt:
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02/27/2009
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Publication #:
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Pub Dt:
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09/03/2009
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Inventors:
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Edward P. Hammond IV, Jing Zou, Rodolfo P. Belen, Michael D. Willwerth, Nicolas Gani et al
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Title:
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ETCH RATE AND CRITICAL DIMENSION UNIFORMITY BY SELECTION OF FOCUS RING MATERIAL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PAULINE S. FISCHER |
| APPLIED MATERIALS, INC. |
| P.O. BOX 450 A |
| SANTA CLARA, CA 95052 |
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