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Patent Assignment Abstract of Title
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Total Assignments: 3
Patent #:
8382301
Issue Dt:
02/26/2013
Application #:
12403233
Filing Dt:
03/12/2009
Publication #:
20090231707
Pub Dt:
09/17/2009
Inventors:
Dirk Heinrich EHM, Stephan MUELLENDER, Thomas STEIN et al
Title:
OPTICAL ARRANGEMENT, IN PARTICULAR PROJECTION EXPOSURE APPARATUS FOR EUV LITHOGRAPHY, AS WELL AS REFLECTIVE OPTICAL ELEMENT WITH REDUCED CONTAMINATION
Assignment: 1
Reel/Frame:
022760/0938Recorded: 06/01/2009Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
EHM, DIRK HEINRICH
Exec Dt:
03/09/2009
MUELLENDER, STEPHAN
Exec Dt:
03/12/2009
STEIN, THOMAS
Exec Dt:
03/12/2009
MOORS, JOHANNES HUBERTUS JOSEPHINA
Exec Dt:
03/10/2009
WOLSCHRIJN, BASTIAAN THEODOOR
Exec Dt:
03/27/2009
KRAUS, DIETER
Exec Dt:
04/02/2009
VERSLUIS, RICHARD
Exec Dt:
03/26/2009
MEIJERINK, MARCUS GERHARDUS HENDRIKUS
Exec Dt:
03/31/2009
Assignees:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
ASML NETHERLANDS B.V.
DE RUN 6501
VELDHOVEN, NETHERLANDS 5504DR
Correspondent:
SUGHRUE MION, PLLC
2100 PENNSYLVANIA AVENUE, N.W.
SUITE 600
WASHINGTON, DC 20037
Assignment: 2
Reel/Frame:
026234/0844Recorded: 04/15/2011Pages: 10
Conveyance:
RE-RECORD TO CHANGE CORRESPONDENCE INFORMATION OF ASSIGNMENT RECORDED AT REEL/FRAME 027760/0938
Assignors:
EHM, DIRK HEINRICH
Exec Dt:
03/09/2009
MUELLENDER, STEPHAN
Exec Dt:
03/12/2009
STEIN, THOMAS
Exec Dt:
03/12/2009
MOORS, JOHANNES HUBERTUS JOSEPHINA
Exec Dt:
03/10/2009
WOLSCHRJIN, BASTIAAN THEODOOR
Exec Dt:
03/27/2009
KRAUS, DIETER
Exec Dt:
04/02/2009
VERSLUIS, RICHARD
Exec Dt:
03/26/2009
MEIJERINK, MARCUS GERHARDUS HENDRIKUS
Exec Dt:
03/31/2009
Assignees:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
ASML NETHERLANDS B.V.
DE RUN 6501
5504 DR VELDHOVEN, NETHERLANDS
Correspondent:
WALTER OTTESEN
PATENT ATTORNEY
P.O. BOX 4026
GAITHERSBURG, MARYLAND 20885-4026
Assignment: 3
Reel/Frame:
025763/0367Recorded: 01/18/2011Pages: 28
Conveyance:
A MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
Correspondent:
TIMOTHY A. FRENCH
FISH & RICHARDSON P.C.
ONE MARINA PARK DRIVE
BOSTON, MASSACHUSETTS 02210-1878

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