Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12432589
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Filing Dt:
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04/29/2009
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Publication #:
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Pub Dt:
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09/24/2009
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Inventors:
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Junji Ikeda, Hideki Komatsuda
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Title:
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OPTICAL ATTENUATOR PLATE, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO, JAPAN 100-8331 |
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| KLARQUIST SPARKMAN, LLP |
| 121 SW SALMON STREET |
| SUITE 1600 |
| PORTLAND, OR 97204 |
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