Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/06/2010
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Application #:
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12080893
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Filing Dt:
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04/07/2008
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Publication #:
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Pub Dt:
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10/08/2009
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Inventor:
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Khoon Peng Lim
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Title:
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REAL-TIME DETECTION OF WAFER SHIFT/SLIDE IN A CHAMBER
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 1 WOODLANDS INDUSTRIAL PARK D |
STREET 1, SINGAPORE 738799 |
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SAILE ACKERMAN LLC |
28 DAVIS AVENUE |
POUGHKEEPSIE, NY 12603 |
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