Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12415690
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Filing Dt:
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03/31/2009
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Publication #:
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Pub Dt:
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10/08/2009
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Inventors:
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Nikolaos Bekiaris, Junyan Dai, Hiram Cervera, Hali Janine Lana Forstner
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Title:
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DOUBLE EXPOSURE LITHOGRAPHY USING LOW TEMPERATURE OXIDE AND UV CURE PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| K-I SHIJO BUILDING, 88 KANKOBOKO-CHO |
| SHIJODORI-MUROMACHI-HIGASHIIRU, SHIMOGYO-KU |
| KYOTO, JAPAN 600-8009 |
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| CRAIG C. LARGENT |
| TOWNSEND AND TOWNSEND AND CREW LLP |
| TWO EMBARCADERO CENTER, 8TH FLOOR |
| SAN FRANCISCO, CA 94111 |
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