Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/24/2012
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Application #:
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12101627
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Filing Dt:
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04/11/2008
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Publication #:
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Pub Dt:
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10/15/2009
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Inventors:
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Minhua Lu, Nils D. Hoivik, Christopher Jahnes, Hongqing Zhang, John M. Cotte
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Title:
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METHOD OF MINIMIZING BEAM BENDING OF MEMS DEVICE BY REDUCING THE INTERFACIAL BONDING STRENGTH BETWEEN SACRIFICIAL LAYER AND MEMS STRUCTURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NEW ORCHARD ROAD |
| ARMONK, NEW YORK 10504 |
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| CONNOLLY BOVE LODGE & HUTZ LLP |
| 1875 EYE STREET, NW |
| SUITE 1100 |
| WASHINGTON, DC 20006 |
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