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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
NONE
Issue Dt:
Application #:
12464730
Filing Dt:
05/12/2009
Publication #:
20090262324
Pub Dt:
10/22/2009
Inventors:
Michael Patra, Markus Deguenther, Michael Layh, Johannes Wangler, Manfred Maul
Title:
ILLUMINATION OPTICS FOR PROJECTION MICROLITHOGRAPHY AND RELATED METHODS
Assignment: 1
Reel/Frame:
022903/0648Recorded: 07/01/2009Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
PATRA, MICHAEL
Exec Dt:
05/29/2009
DEGUENTHER, MARKUS
Exec Dt:
06/18/2009
LAYH, MICHAEL
Exec Dt:
06/04/2009
WANGLER, JOHANNES
Exec Dt:
06/02/2009
MAUL, MANFRED
Exec Dt:
06/16/2009
Assignee:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
CHRIS C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
025763/0367Recorded: 01/18/2011Pages: 28
Conveyance:
A MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
73447 OBERKOCHEN, GERMANY
Correspondent:
TIMOTHY A. FRENCH
FISH & RICHARDSON P.C.
ONE MARINA PARK DRIVE
BOSTON, MASSACHUSETTS 02210-1878

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