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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/08/2012
Application #:
12407244
Filing Dt:
03/19/2009
Publication #:
Pub Dt:
10/29/2009
Inventor:
Eiichi NISHIMURA
Title:
METHOD OF FORMING ETCHING MASK, ETCHING METHOD USING THE ETCHING MASK, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE INCLUDING THE ETCHING METHOD
Assignment: 1
Reel/Frame:
022420/0600Recorded: 03/19/2009Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
03/08/2009
Assignee:
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
CANTOR COLBURN, LLP
20 CHURCH STREET
22ND FLOOR
HARTFORD, CT 06103

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