Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12494858
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Filing Dt:
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06/30/2009
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Publication #:
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Pub Dt:
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11/12/2009
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Inventors:
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Lambert Danner, Michael Heiden, Wolfgang Vollrath, Alexander Buttner et al
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Title:
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DEVICE AND METHOD FOR THE INSPECTION OF DEFECTS ON THE EDGE REGION OF A WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| KUBACHER WEG 4 |
| WEILBURG, GERMANY 35781 |
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| MARIA M. ELISEEVA |
| HOUSTON ELISEEVA LLP |
| 4 MILITIA DRIVE, SUITE 4 |
| LEXINGTON, MA 02421 |
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