Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/22/2012
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Application #:
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12116897
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Filing Dt:
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05/07/2008
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Publication #:
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Pub Dt:
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11/12/2009
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Inventors:
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Scott Wong, Jeffrey Lin, Andrew D. Bailey III, Jack Chen, Benjamin W. Mooring et al
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Title:
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DYNAMIC ALIGNMENT OF WAFERS USING COMPENSATION VALUES OBTAINED THROUGH A SERIES OF WAFER MOVEMENTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| MARTINE PENILLA & GENCARELLA, LLP |
| 710 LAKEWAY DRIVE |
| SUITE 200 |
| SUNNYVALE, CA 94085 |
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