Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/05/2014
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Application #:
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12457175
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Filing Dt:
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06/03/2009
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Publication #:
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Pub Dt:
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12/10/2009
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Inventors:
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Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Takahiro Ogawa et al
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Title:
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Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, HANEDA ASAHI-CHO, OHTA-KU |
| TOKYO, JAPAN |
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| WENDEROTH, LIND & PONACK, L.L.P. |
| ATTN: W. DOUGLAS HAHM, ESQ. |
| 1030 15TH STREET, N.W. |
| SUITE 400 EAST |
| WASHINGTON, DC 20005-1503 |
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