Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12483573
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Filing Dt:
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06/12/2009
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Publication #:
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Pub Dt:
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12/17/2009
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Inventors:
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Hirokazu UEDA, Yoshinobu TANAKA, Yasuhiro OTSUKA, Masanobu NAKAHASHI
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Title:
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GAS RING, APPARATUS FOR PROCESSING SEMICONDUCTOR SUBSTRATE, THE APPARATUS INCLUDING THE GAS RING, AND METHOD OF PROCESSING SEMICONDUCTOR SUBSTRATE BY USING THE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| CANTOR COLBURN, LLP |
| 20 CHURCH STREET, 22ND FLOOR |
| HARTFORD, CT 06103 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 300 E. STREET SW |
| WASHINGTON, DISTRICT OF COLUMBIA 20546 |
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| NASA LANGLEY RESEARCH CENTER |
| OFFICE OF CHIEF COUNSEL |
| MAIL STOP 141 |
| HAMPTON, VA 23681-2199 |
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