Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12502142
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Filing Dt:
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07/13/2009
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Publication #:
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Pub Dt:
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01/21/2010
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Inventors:
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Hugo Silva, Johannes Lindner, Thomas E. Seidel, Gerhard K. Strauch, Martin Dauelsberg
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Title:
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ISOLATION FOR MULTI-SINGLE-WAFER PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1139 KARLSTAD DRIVE |
| SUNNYVALE, CALIFORNIA 94089 |
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| SONNENSCHEIN NATH & ROSENTHAL LLP |
| POST OFFICE BOX 061080 |
| WACKER DRIVE STATION, WILLIS TOWER |
| CHICAGO, IL 60606 |
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