Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12178523
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Filing Dt:
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07/23/2008
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Publication #:
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Pub Dt:
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01/28/2010
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Inventors:
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Sang In Yi, Kelvin Chan, Alexandros T. Demos, Thomas Nowak
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Title:
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SUPERIMPOSITION OF RAPID PERIODIC AND EXTENSIVE POST MULTIPLE SUBSTRATE UV-OZONE CLEAN SEQUENCES FOR HIGH THROUGHPUT AND STABLE SUBSTRATE TO SUBSTRATE PERFORMANCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P. O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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