Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12540611
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Filing Dt:
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08/13/2009
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Publication #:
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Pub Dt:
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02/18/2010
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Inventors:
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Maarten Marinus Johannes Wilhelmus VAN HERPEN, Vadim Yevgenyevich BANINE et al
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Title:
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RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL-5504 DR |
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| PILLSBURY WINTHROP SHAW PITTMAN LLP |
| 1650 TYSONS BOULEVARD |
| MCLEAN, VA 22102-4865 |
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