Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/16/2010
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Application #:
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12198004
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Filing Dt:
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08/25/2008
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Publication #:
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Pub Dt:
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02/25/2010
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Inventors:
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Masahiro Takizawa, Teruhide Nishino
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Title:
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SEMICONDUCTOR MANUFACTURING APPARATUS EQUIPPED WITH WAFER INSPECTION DEVICE AND INSPECTION TECHNIQUES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 23-1, 6-CHOME, NAGAYAMA, TAMA-SHI |
| TOKYO, 206-0025, JAPAN |
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| KNOBBE, MARTENS, OLSON & BEAR, LLP |
| 2040 MAIN STREET, 14TH FLOOR |
| IRVINE, CALIFORNIA 92614 |
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