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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
12562137
Filing Dt:
09/18/2009
Publication #:
20100072172
Pub Dt:
03/25/2010
Inventors:
Akio Ui, Hisataka Hayashi, Takeshi Kaminatsui, Shinji Himori, Takeshi Ohse et al
Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Assignment: 1
Reel/Frame:
023442/0861Recorded: 10/29/2009Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
UI, AKIO
Exec Dt:
09/10/2009
HAYASHI, HISATAKA
Exec Dt:
09/14/2009
KAMINATSUI, TAKESHI
Exec Dt:
09/30/2009
HIMORI, SHINJI
Exec Dt:
09/08/2009
YAMADA, NORIKAZU
Exec Dt:
09/08/2009
OHSE, TAKESHI
Exec Dt:
09/08/2009
ABE, JUN
Exec Dt:
09/08/2009
Assignees:
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU,
TOKYO, JAPAN 105-8001
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,
TOKYO, JAPAN 107-6325
Correspondent:
FINNEGAN, HENDERSON, FARABOW, GARRETT &
901 NEW YORK AVE., NW
WASHINGTON, DC 20001

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