Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/04/2012
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Application #:
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12627977
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Filing Dt:
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11/30/2009
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Publication #:
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Pub Dt:
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03/25/2010
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Inventors:
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Hua Chung, Nirmalya Maity, Roderick Craig Mosely, Jick Yu, Mei Chang
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Title:
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INTEGRATION OF ALD TANTALUM NITRIDE FOR COPPER METALLIZATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| PATENT COUNSEL |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON & SHERIDAN, L.L.P. |
| APPLIED MATERIALS, INC. |
| 3040 POST OAK BOULEVARD, SUITE 1500 |
| HOUSTON, TX 77056 |
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