Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12557264
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Filing Dt:
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09/10/2009
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Publication #:
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Pub Dt:
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04/01/2010
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Inventors:
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Kenichiro TORATANI, Fumiki Aiso, Takashi Nakao, Kazuhei Yoshinaga
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Title:
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SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CLEANING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1-1, SHIBAURA 1-CHOME, MINATO-KU |
TOKYO, JAPAN 105-8001 |
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FINNEGAN |
901 NEW YORK AVENUE NW |
WASHINGTON DC, DC 20001 |
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