Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/04/2013
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Application #:
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12565436
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Filing Dt:
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09/23/2009
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Publication #:
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Pub Dt:
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04/01/2010
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Inventors:
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Henry S. Povolny, Andreas Fischer
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Title:
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ADJUSTABLE THERMAL CONTACT BETWEEN AN ELECTROSTATIC CHUCK AND A HOT EDGE RING BY CLOCKING A COUPLING RING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538-6470 |
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| BRADLEY W SCHEER |
| SCHWEGMAN, LUNDBERG & WOESSNER, P.A. |
| P.O. BOX 2938 |
| MINNEAPOLIS, MN 55402-0938 |
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