Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/13/2012
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Application #:
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12598081
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Filing Dt:
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10/29/2009
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Publication #:
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Pub Dt:
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04/08/2010
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Inventors:
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Masahisa Ueda, Yutaka Kokaze, Mitsuhiro Endou, Koukou Suu
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Title:
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DRY CLEANING METHOD FOR PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2500 HAGISONO |
| CHIGASAKI-SHI, JAPAN |
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| GROSSMAN, TUCKER, PERREAULT & PFLEGER, P |
| 55 SOUTH COMMERICAL STREET |
| MANCHESTER, NH 03101 |
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